Index

absolute pressure – Sections 2.3, 2.4 (2.4.1, 2.4.2, 2.4.3), 2.5, 4.5.1.

absolute zero – Section 4.4.

absorption (absorb) – Sections 2.8, 3.4 (3.4.2).

adsorption (adsorb) – Section 2.7.

Amonton’s law – Sections 2.4 (2.4.3).

atmospheric pressure – Sections 1.3 (1.3.3, 1.3.4), 1.5, 2.3, 2.4, 2.6, 2.10, 3.2, 3.3, 3.4 (3.4.4), 3.6, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.9.

Avogadro’s law – Section 2.4.

backing pump – Sections 4.4 (4.4.1, 4.4.4).

backstreaming (oil) – Sections 4.3, 4.4.

bar and millibar – Section 2.3.

Bayard Alpert (hot cathode) ion gauge – Sections 3.4 (3.4.3).

Bourdon gauge – Sections 2.3, 3.4 (3.4.3), 4.5 (4.5.1).

Boyle’s law – Sections 2.4 (2.4.1, 2.4.2), 2.5, 4.4.

bulk gas – Sections 3.2, 4.2, 4.3.

butterfly valve – Sections 3.4 (3.4.4), 3.6.

capacitance diaphragm gauge – Sections 2.3, 3.4 (3.4.3), 4.5 (4.5.2).

capture pumps – Section 3.4 (3.4.2).

Conflat-type (CF) flange – Sections 3.4 (3.4.1, 3.4.4).

Chamber – Sections 1.2, 1.3 (1.3.1, 1.3.2, 1.3.4), 1.4, 1.5, 1.7, 2.3, 2.4 (2.4.1 – 2.4.4), 2.6, 2.7, 2.10, 3.1, 3.2, 3.3, 3.4 (3.4.1 – 3.4.4), 3.6, 4.1, 4.2, 4.3, 4.4 (4.4.1 – 4.4.4), 4.5 (4.5.1, 4.5.3), 4.6, 4.7, 4.8, 4.9.

Charles’s law – Sections 2.4 (2.4.3), 2.5.

combined gas law – Section 2.5.

compressibility – Section 2.4 (2.4.2).

condensation – Sections 2.1, 2.2, 2.10, 4.4 (4.4.3).

conductance – Sections 3.1, 3.3, 3.4 (3.4.1, 3.4.4), 3.6, 4.1, 4.7, 4.8.

convection-enhanced Pirani (thermal) gauge – Sections 3.4 (3.4.3), 4.5 (4.5.3, 4.5.4), 4.7.

cryogenic (cryo) pump – Sections 1.5, 3.4 (3.4.2).

Dalton’s law – Sections 2.4 (2.4.1, 2.4.5).

desorption (desorb) – Sections 2.7, 3.4 (3.4.4), 4.3.

diaphragm gauge – Sections 2.3, 3.4 (3.4.3), 4.5 (4.5.2).

diaphragm pump – Sections 1.5, 3.4 (3.4.2), 4.4 (4.4.1, 4.4.2, 4.4.3, 4.4.5).

diffusion – Sections 2.8, 3.4 (3.4.2), 4.3.

diffusion pump – Section 3.4 (3.4.2).

direct reading (pressure) gauges (manometers) – Sections 2.3, 3.4 (3.4.3), 4.5 (4.5.1, 4.5.2).

dry pumps – Sections 4.4 (4.4.1, 4.4.2, 4.4.4).

effective pumping speed – Section 4.7.

elastomer – Sections 3.2, 3.4 (3.4.1, 3.4.4), 4.6.

elbows – Sections 3.4 (3.4.4), 4.6.

equilibrium vapor pressure – Section 2.10.

evaporation – Sections 1.3 (1.3.4), 1.4, 2.2, 2.6, 2.10.

exhaust line – Sections 3.4, 4.4 (4.4.3).

feedthrough – Sections 3.4 (3.4.4).

foreline – Sections 3.4 (3.4.4).

freeze, freezing – Sections 1.3 (1.3.1, 1.3.5, ), 1.4, 1.5, 2.2, 2.10, 3.4 (3.4.2).

gage pressure – Sections 2.3, 2.4 (2.4.2), 4.5 (4.5.1).

gas load – Sections 1.7, 2.7, 2.8, 2.10, 3.1, 3.2, 3.3, 3.4 (3.4.1, 3.4.2), 4.1, 4.3, 4.4 (4.4.1, 4.4.2), 4.6, 4.7, 4.9.

gas molecule – Sections 1.2, 1.3 (1.3.2), 1.4, 1.5, 2.1, 2.2, 2.3, 2.4 (2.4.1, 2.4.2, 2.4.3, 2.4.4), 2.6, 2.7, 2.8, 2.10, 3.1, 3.2, 3.3, 3.4 (3.4.2, 3.4.3, 3.4.4), 4.1.

gas phase – Sections 2.7, 2.10, 3.4 (3.4.2), 4.3.

gas transfer pumps – Sections 3.4 (3.4.2).

gate valve – Sections 3.4 (3.4.4).

gauge, Bayard-Alpert – Sections 3.4 (3.4.3).

gauge, Bourdon – Sections 2.3, 3.4 (3.4.3), 4.5 (4.5.1, 4.5.4).

gauge, capacitance diaphragm – Sections 2.3, 3.4 (3.4.3), 4.5 (4.5.2, 4.5.4).

gauge, convection-enhanced Pirani (thermal) – Sections 3.4 (3.4.3), 4.5 (4.5.3.2, 4.5.3.3), 4.5.4, 4.7.

gauge, diaphragm – Sections 2.3, 3.4 (3.4.3), 4.5 (4.5.2).

gauge, hot cathode ionization – Sections 3.4 (3.4.3).

gauge, McLeod – Sections 3.4 (3.4.3).

gauge, MEMS Pirani – Sections 4.5 (4.5.3.2, 4.5.4).

gauge, piezoelectric vacuum – Sections 4.5 (4.5.4).

gauge, Pirani – Sections 3.4 (3.4.3), 3.6, 4.5 (4.5.3.2).

gauge, pressure – Sections 1.7, 2.3, 2.4 (2.4.2), 2.9, 2.10, 3.1, 3.4 (3.4.3, 3.4.4), 4.5, 4.7, 4.9.

gauge, thermal (conductivity) – Sections 4.5 (4.5.3).

gauge, thermocouple – Sections 2.3, 3.4 (3.4.3), 4.5 (4.5.3.1, 4.5.3.2, 4.5.4).

gauge, vacuum (pressure) – Sections 3.4 (3.4.3, 3.5, 4.2, 4.5, 4.7.

gauges, direct reading (pressure) gauges (manometers) – Sections 2.3, 3.4 (3.4.3), 4.5 (4.5.1, 4.5.2).

gauges, indirect reading (pressure) – Sections 2.3, 3.4 (3.4.3), 4.5 (4.5.3).

gauges, ionization vacuum – Sections 3.4 (3.4.3).

Gay-Lussac’s law – Sections 2.4 (2.4.3, 2.5).

hot cathode ionization gauge – Sections 3.4 (3.4.3).

house exhaust system – Section 4.2.

hydrogen bond – Section 2.7.

ideal gas law – Sections 2.5, 3.1, 3.2, 3.3.

indirect reading (pressure) gauges – Sections 2.3, 3.4 (3.4.3), 4.5 (4.5.3).

ionization vacuum gauges – Sections 3.4 (3.4.3).

ISO flange -Section 3.4 (3.4.4).

isolation valve – Sections 3.3, 3.4 (3.4.4).

KF (Klein Flansche) flange – Sections 3.4 (3.4.1, 3.4.4), 3.6, 4.6.

kinetic vacuum pumps – Sections 3.4 (3.4.2).

laminar flow – Section 4.8.

leaks, gross (real) – Sections 3.2, 4.1, 4.3, 4.5 (4.5.1).

leaks, virtual – Sections 3.2, 4.3.

lobe blower pump – Sections 4.4 (4.4.4).

mBar – Sections 2.3, 3.3, 4.5 (4.5.1).

McLeod gauge – Sections 3.4 (3.4.3).

mean free path (MFP) – Sections 1.4, 2.6, 3.1, 4.1.

mechanical pumps – Sections 1.5, 3.4 (3.4.2), 4.4 (4.4.3), 4.7, 4.8, 4.9.

mechanical roughing pumps – Sections 3.4 (3.4.2), 4.1, 4.2, 4.4 (4.4.1, 4.4.5).

MEMS Pirani gauge – Sections 4.5 (4.5.3.2, 4.5.4).

molecular density – Sections 1.4, 2.4 (2.4.1), 3.1, 3.3, 4.1, 4.5 (4.5.3), 4.7.

net pumping speed – Sections 3.3, 3.4 (3.4.1), 4.7, 4.8.

nipples – Sections 3.4 (3.4.4), 4.6.

O-ring – Sections 3.2, 3.4 (3.4.1, 3.4.4), 4.6.

Outgassing – Sections 3.2, 3.4 (3.4.1, 3.4.4), 4.3, 4.6.

partial pressure – Sections 1.7, 2.4 (2.4.1, 2.4.5).

pascal (Pa) and kilo-pascal (kPa) – Section 2.3.

permeation (permeability) – Sections 2.8, 3.2, 3.4 (3.4.1), 4.3, 4.6.

piezoelectric vacuum gauge – Sections 4.5 (4.5.4).

piezoelectricity – Sections 4.5 (4.5.4).

Pirani gauge – Sections 3.4 (3.4.3), 3.6, 4.5 (4.5.3.2).

piston (vacuum) pump – Sections 3.4 (3.4.2), 4.4.

poppet valve – Sections 3.4 (3.4.4).

positive displacement pump – Sections 3.4 (3.4.2), 4.4 (4.4.1, 4.4.4), 4.6.

pressure – Sections 1.2, 1.3 (1.3.2, 1.3.3, 1.3.4), 1.4, 1.5, 1.7, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.9, 2.10, 3.1, 3.2, 3.3, 3.4, 3.6, 3.7, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8, 4.9.

pressure gauge – Sections 1.7, 2.3, 2.4 (2.4.2), 2.9, 2.10, 3.1, 3.4 (3.4.3, 3.4.4), 4.5, 4.7, 4.9.

psi (psig) – Sections 1.3 (1.3.3), 2.3, 3.4 (3.4.3), 4.5 (4.5.2).

pump, cryogenic (cryo) – Sections 1.5, 3.4 (3.4.2).

pump, diaphragm – Sections 1.5, 3.4 (3.4.2), 4.4 (4.4.1, 4.4.2, 4.4.3, 4.4.5).

pump, diffusion – Section 3.4 (3.4.2).

pump, lobe blower – Sections 4.4 (4.4.4).

pump, piston (vacuum) – Sections 3.4 (3.4.2), 4.4.

pump, positive displacement – Sections 3.4 (3.4.2), 4.4 (4.4.1, 4.4.4), 4.6.

pump, reciprocating (vacuum) – Sections 3.4 (3.4.2).

pump, Roots (blower) – Sections 3.4 (3.4.2), 4.4 (4.4.4, 4.4.5).

pump, rotary piston (vacuum) – Sections 3.4 (3.4.2), 4.4 (4.4.5).

pump, rotary (vacuum) – Sections 3.4 (3.4.2), 4.4 (4.4.3).

pump, rotary vane – Sections 1.5, 3.4 (3.4.2), 4.4 (4.4.2, 4.4.3, 4.4.5, 4.7.

pump, rough (vacuum) – Sections 3.4 (3.4.2), 3.6, 4.4, 4.7.

pump, roughing – Sections 3.4 (3.4.2), 4.1, 4.2, 4.4 (4.4.1, 4.4.5).

pump, screw – Sections 3.4 (3.4.2), 4.4 (4.4.5).

pump, scroll – Sections 1.5, 3.4 (3.4.2), 4.4 (4.4.5).

pump, vacuum – Sections 1.1, 1.2, 3.1, 3.3, 3.4 (3.4.2, 3.4.3, 3.4.4), 3.5, 3.6, 4.1, 4.4, 4.6, 4.7, 4.8, 4.9.

pump down – Sections 3.3, 4.4 (4.4.4), 4.5 (4.5.1), 4.7.

pump-down curve – Sections 3.7, 4.1, 4.4, 4.7, 4.9.

pump-down time – Sections 3.3, 3.7, 4.1, 4.7.

pumping speed – Sections 3.1, 3.3, 3.4 (3.4.1, 3.4.2), 4.2, 4.4 (4.4.1, 4.4.2, 4.4.3, 4.4.4, 4.4.5), 4.7, 4.8.

pumping speed curve – Section 4.7.

pumps, capture – Sections 3.4 (3.4.2).

pumps, dry – Sections 4.4 (4.4.1, 4.4.2, 4.4.4).

pumps, gas transfer – Sections 3.4 (3.4.2).

pumps, kinetic vacuum – Sections 3.4 (3.4.2).

pumps, mechanical (roughing) – Sections 1.5, 3.4 (3.4.2), 4.1, 4.2, 4.4 (4.4.1, 4.4.3, 4.4.5), 4.7, 4.8, 4.9.

rarefaction – Section 1.2

real leak – Sections 3.2, 4.1, 4.3, 4.5 (4.5.1).

reciprocating (vacuum) pump – Sections 3.4 (3.4.2).

retard – Sections 1.3 (1.3.2).

Roots (blower) pump – Sections 3.4 (3.4.2), 4.4 (4.4.4, 4.4.5).

rotary piston (vacuum) pump – Sections 3.4 (3.4.2), 4.4 (4.4.5).

rotary (vacuum) pump – Sections 3.4 (3.4.2), 4.4 (4.4.3).

rotary vane pump – Sections 1.5, 3.4 (3.4.2), 4.4 (4.4.2, 4.4.3, 4.4.5, 4.7.

rough (vacuum) pump – Sections 3.4 (3.4.2), 3.6, 4.4, 4.7.

rough vacuum (pressure) regime – Sections 1.7, 2.3, 3.4 (3.4.3), 4.1, 4.3, 4.5 (4.5.3, 4.5.4), 4.6.

roughing, roughing line – Sections 3.4 (3.4.4), 3.6, 4.2, 4.4 (4.4.3), 4.7.

roughing pump – Sections 3.4 (3.4.2), 4.1, 4.2, 4.4 (4.4.1, 4.4.5).

saturation vapor pressure – Sections 4.4 (4.4.3).

screw pump – Sections 3.4 (3.4.2), 4.4 (4.4.5).

scroll pump – Sections 1.5, 3.4 (3.4.2), 4.4 (4.4.5).

SI – Section 2.3.

standard atmospheric pressure – Sections 2.2, 2.10, 4.5 (4.5.1).

standard temperature & pressure (STP) – Sections 2.4 (2.4.4, 2.4.5), 2.5.

sublimation – Sections 1.3 (1.3.1), 1.5, 2.1, 2.2, 2.10.

tees – Sections 3.4 (3.4.4), 4.6.

thermal (conductivity) gauge – Sections 4.5 (4.5.3).

thermocouple gauge – Sections 2.3, 3.4 (3.4.3), 4.5 (4.5.3.1, 4.5.3.2, 4.5.4).

throttle vale (throttling valve) – Sections 3.4 (3.4.4).

throughput – Sections 3.1, 3.3, 3.4 (3.4.1).

torr – Sections 2.3, 2.4, 2.5, 2.6, 2.7, 2.9, 2.10, 3.2, 3.3, 3.4, 4.1, 4.2, 4.3, 4.4, 4.5, 4.6, 4.7, 4.8.

ultimate pressure – Sections 4.2, 4.4 (4.4.1 – 4.4.5), 4.7, 4.8.

universal gas constant – Section 2.5.

vacuum – Sections 1.1, 1.2, 2.1, 2.2, 2.3, 2.10, 3.1, 3.3, 3.4 (3.4.2, 3.4.3), 4.1, 4.7, 4.9.

vacuum chamber – Sections 1.3 (1.3.1), 3.3, 3.4 (3.4.1), 3.6, 4.4 (4.4.2), 4.5 (4.5.1, 4.5.3), 4.6, 4.7, 4.8.

vacuum component – Sections 1.7, 2.7, 3.2, 3.3, 3.5, 3.6, 4.6.

vacuum (pressure) gauge – Sections 3.4 (3.4.3, 3.5, 4.2, 4.5, 4.7.

vacuum piping components – Sections 3.4 (3.4.4).

vacuum pump – Sections 1.1, 1.2, 3.1, 3.3, 3.4 (3.4.2, 3.4.3, 3.4.4), 3.5, 3.6, 4.1, 4.4, 4.6, 4.7, 4.8, 4.9.

vacuum technology – Sections 1.1, 1.3 (1.3.1, 1.3.2, 1.3.5), 1.4, 1.6, 2.3, 2.9, 3.1.

vapor, vapor state – Sections 1.3 (1.3.4, 1.3.5), 1.4, 1.5, 2.2, 2.6, 2.7, 2.10, 3.2, 3.4 (3.4.1, 3.4.2), 4.1, 4.3, 4.4 (4.4.1 – 4.4.5), 4.5 (4.5.3.3), 4.6, 4.9.

vaporization – Sections 1.4, 2.10.

vent valve – Sections 3.4, 3.5, 3.6, 4.2, 4.4, 4.7, 4.9.

virtual leak – Sections 3.2, 4.3.

viscous flow – Sections 4.5 (4.5.3.2), 4.6, 4.8.

volume flow rate (volumeric flow rate) – Section 3.3.

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Introduction to Vacuum Technology Copyright © by David M. Hata, Elena V. Brewer, Nancy J. Louwagie is licensed under a Creative Commons Attribution-NonCommercial-ShareAlike 4.0 International License, except where otherwise noted.

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